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Effect of composition inhomogeneity in a-SiOxNy thin films on their optical properties

✍ Scribed by Farida Rebib; Eric Tomasella; Victor Micheli; Celine Eypert; Joel Cellier; Nadhira Laidani

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 250 KB
Volume: 31
Category: Article
ISSN: 0925-3467
DOI: 10.1016/j.optmat.2007.10.025

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