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Effect of collision cascade density on swelling and surface topography of GaN

✍ Scribed by Titov, A.I.; Karaseov, P.A.; Karabeshkin, K.V.; Belyakov, V.S.; Arkhipov, A.V.; Kucheyev, S.O.

Book ID
121363045
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
599 KB
Volume
315
Category
Article
ISSN
0168-583X

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The damage accumulation in 6H-SiC bombarded at room temperature with 1.3 keV/amu atomic P + ions and small cluster ions PF ΓΎ n (n = 2 and 4) have been studied by Rutherford backscattering spectrometry in channeling mode. Results show that collision cascade density strongly affects damage buildup in