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Effect of CF4 plasma pretreatment on low temperature oxides

✍ Scribed by Tzu Yun Chang; Hsiao Wei Chen; Tan Fu Lei; Tien Sheng Chao

Book ID
114616959
Publisher
IEEE
Year
2002
Tongue
English
Weight
682 KB
Volume
49
Category
Article
ISSN
0018-9383

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## Abstract A commercial platinized tin oxide catalyst used for low‐temperature CO oxidation has been characterized using ion scattering spectroscopy, Auger electron spectroscopy and electron spectroscopy for chemical analysis before and after reduction in 40 Torr of CO for 1 h at various temperatu