✦ LIBER ✦
Effect of the low-temperature heating on formation and evolution of defects in PHEMT AlGaAs/InGaAs structures exposed by CF4 plasma
✍ Scribed by T.S. Shamirzaev; K.S. Zhuravlev; A.I. Toropov; A.K. Bakarov
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 292 KB
- Volume
- 340-342
- Category
- Article
- ISSN
- 0921-4526
No coin nor oath required. For personal study only.