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Effect of capping layer on coercivity of permalloy thin films with interconnected network

✍ Scribed by Wang, L. ;Sheng, W. T. ;You, B. ;Du, J. ;Hu, An ;Lu, M. ;Zhou, S. M.

Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
83 KB
Volume
201
Category
Article
ISSN
0031-8965

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The effect of the type of capping layer and post-CMP surface treatments on the adhesion between damascene Cu and the capping layer was investigated. The CMPed-surface was treated by six methods divided into four groups which consisted of no surface treatment, cleaning by plasma with vacuum break, cl