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Effect of bumps on the wafer on ion distribution functions in high-density argon and argon-chlorine discharges

โœ Scribed by Woodworth, J. R.; Aragon, B. P.; Hamilton, T. W.


Book ID
127181393
Publisher
American Institute of Physics
Year
1997
Tongue
English
Weight
312 KB
Volume
70
Category
Article
ISSN
0003-6951

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