𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effect of assistant RF plasma on structure and properties of SiCN thin films prepared by RF magnetron sputtering of SiC target

✍ Scribed by W.L. Li; J.L. Yang; Y. Zhao; W.D. Fei


Book ID
116605016
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
199 KB
Volume
482
Category
Article
ISSN
0925-8388

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES