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Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses

✍ Scribed by S.P.A. Osório; I. Montero; J. Perrière; J.M. Martinez-Duart


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
309 KB
Volume
70-71
Category
Article
ISSN
0169-4332

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