A Study of the Rapid Thermal Annealing Process for PECVD-Deposited Borophosphosilicate Glass

✍ Scribed by Naimpally, A.

• Publisher: Curtin University of Technology
• Year: 2008
• Tongue: English
• Weight: 463 KB
• Volume: 5
• Category: Article
• ISSN: 0969-1855
• DOI: 10.1002/apj.5500050309