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Effect of annealing on pulsed laser deposited zirconium oxide thin films

✍ Scribed by M.F. Al-Kuhaili; S.M.A. Durrani


Book ID
116608747
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
697 KB
Volume
509
Category
Article
ISSN
0925-8388

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Effect of annealing on thermal stability
✍ Yansheng Gong; Chuanbin Wang; Qiang Shen; Lianmeng Zhang πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 591 KB

Iridium (Ir) thin films, deposited on Si (1 0 0) substrate by pulsed laser deposition (PLD) technique using Ir target in a vacuum atmosphere, were annealed in air ambient and the thermal stability was investigated. The crystal structure and surface morphology of Ir thin films before and after being