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Effect of annealing on properties of lithium aluminum germanium phosphate electrolyte thick films prepared by aerosol deposition

✍ Scribed by Khan, Ashraf; Ahn, Cheol-Woo; Ryu, Jungho; Yoon, Woon-Ha; Hahn, Byung-Dong; Choi, Jong-Jin; Kim, Jong-Woo; Park, Dong-Soo

Book ID
125381264
Publisher
TechnoPress
Year
2014
Tongue
English
Weight
651 KB
Volume
20
Category
Article
ISSN
1598-9623

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✍ C.M. Huang; S.F. Wang; C.J. Peng; J. Shieh; C.S. Chang; T.S. Lin πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 522 KB

Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan Ξ΄) of the as-deposited film measured at 100 kHz are 223 and 0.034, res