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Effect of Al2O3Content on Electrical Breakdown Properties of Al2O3/Cu Composite

✍ Scribed by Xianhui Wang; Shuhua Liang; Ping Yang; Zikang Fan


Publisher
Springer US
Year
2010
Tongue
English
Weight
876 KB
Volume
19
Category
Article
ISSN
1059-9495

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Electrical properties of Al2O3 gate diel
✍ Changhai Lin; Jinfeng Kang; Dedong Han; Dayu Tian; Wei Wang; Jinghua Zhang; Meng πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 119 KB

Al O gate dielectric thin films were deposited by reactive dc magnetron sputtering. The electrical properties 2 3 and the carrier transport mechanisms were studied. The results indicate that higher temperature annealing in oxygen ambient is helpful to improve the electrical properties of Al O gate d