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Effect of Al incorporation on the AlGaN growth by metalorganic chemical vapor deposition

✍ Scribed by D.G. Zhao; Z.S. Liu; J.J. Zhu; S.M. Zhang; D.S. Jiang; Hui Yang; J.W. Liang; X.Y. Li; H.M. Gong

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 582 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.04.062

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