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Effect of adsorbed water on the resolution of scanning capacitance microscopes

✍ Scribed by Lányi, Štefan

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
121 KB
Volume
27
Category
Article
ISSN
0142-2421

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✦ Synopsis

The scanning capacitance microscope (SCM) probe, a sharp tip, is a potential centre at which condensation of water vapour from the ambient atmosphere may occur. The water droplet, held by capillary forces, may connect the tip with the imaged surface and modify the local contribution to the tip-to-sample capacitance, and thus the sensitivity, contrast and lateral resolution of the SCM. The expected e †ects have been analysed by mapping the electrostatic Ðeld of the SCM probe Copyright 1999 John Wiley & Sons Ltd.

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