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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Atomic Layer Deposition of High-k Dielectric Layers on Ge and III-V MOS Channels

✍ Scribed by Delabie, Annelies; Alian, A.; Bellenger, Florence; Brammertz, Guy; Brunco, David P.; Caymax, Matty; Conard, Thierry; Franquet, A.; Houssa, Michel; Sioncke, Sonja; Van Elshocht, S.; Van Hemmen, J. L.; Keuning, W.; Kessels, W. M.; Avanasiev, Valery; Stesmans, Andre; Heyns, Marc M.; Meuris, Marc

Book ID: 126895606
Publisher: ECS
Year: 2008
Weight: 605 KB
Volume: 16
Category: Article
DOI: 10.1149/1.2986824

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