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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Etch Rates of Ge, GaAs and InGaAs in Acids, Bases and Peroxide Based Mixtures

✍ Scribed by Sioncke, Sonja; Brunco, David P.; Meuris, Marc; Uwamahoro, Olivier; Van Steenbergen, Jan; Vrancken, Evi; Heyns, Marc M.

Book ID: 127220156
Publisher: ECS
Year: 2008
Weight: 343 KB
Volume: 16
Category: Article
DOI: 10.1149/1.2986802

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