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ECR plasma-assisted deposition of Al2O3 and dispersion-strengthened AlOx

✍ Scribed by J.C. Barbour; D.M. Follstaedt; S.M. Myers

Book ID: 113286902
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 724 KB
Volume: 106
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)00814-4

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