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Dynamics of photo-ionization, heating and crystallization of implanted silicon during laser annealing

✍ Scribed by G.D. Ivlev; E.I. Gatzkevich; R.M. Bayazitov; R.I. Batalov; I.B. Khaibullin

Book ID: 103861815
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 397 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.003

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