Dynamics of nanoclustering in Te+implanted Si after application of high frequency electromagnetic field and thermal annealing

✍ Scribed by M. Kalitzova; O.I. Lebedev; G. Zollo; K. Gesheva; E. Vlakhov; Y. Marinov; T. Ivanova

• Book ID: 106020979
• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 601 KB
• Volume: 91
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-008-4441-2