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Dynamic simulation of process control of the reactive sputter process and experimental results

✍ Scribed by Malkomes, N.; VergoÌhl, M.

Book ID: 121270768
Publisher: American Institute of Physics
Year: 2001
Tongue: English
Weight: 430 KB
Volume: 89
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1328407

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