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Dynamic Monte Carlo simulation of nonlinear damage growth during ion implantation of crystalline silicon

โœ Scribed by E. Albertazzi; M. Bianconi; G. Lulli; R. Nipoti; A. Carnera; C. Cellini


Book ID
113287443
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
451 KB
Volume
112
Category
Article
ISSN
0168-583X

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