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Dynamic modeling and control of an atomic force microscope probe measurement system

✍ Scribed by Kuo, C.-F. J.; Huy, V. Q.; Chiu, C.-H.; Chiu, S.-F.

Book ID: 119969498
Publisher: SAGE Publications
Year: 2011
Tongue: English
Weight: 467 KB
Volume: 18
Category: Article
ISSN: 1077-5463
DOI: 10.1177/1077546310397794

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