Dynamic interaction of floating substrates with an ion beam from a three grid microtech system operated without neutralizer

✍ Scribed by Dan Nir

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 528 KB
• Volume: 36
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(86)90011-4