Dynamic interaction of floating substrates with an ion beam from a three grid microtech system operated without neutralizer : Dan Nir. Vacuum36(6), 317 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 133 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90147-8