Dual-type CMOS gate electrodes by dopant diffusion from silicide

✍ Scribed by Nygren, S.; Amm, D.T.; Levy, D.; Torres, J.; Goltz, G.; d'Ouville, T.T.; Delpech, P.

• Book ID: 114535376
• Publisher: IEEE
• Year: 1989
• Tongue: English
• Weight: 768 KB
• Volume: 36
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.24352