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Dual-facing-target-sputtered amorphous CoMoN/CN compound soft-X-ray multilayers: structures and thermal stability

โœ Scribed by H.L. Bai; Z.J. He; W.B. Mi; P. Wu; Z.Q. Li; E.Y. Jiang


Publisher
Springer
Year
2003
Tongue
English
Weight
548 KB
Volume
77
Category
Article
ISSN
1432-0630

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