Characterization of heat-treated CN films fabricated by dual-facing-target sputtering for soft X-ray multilayer mirrors

✍ Scribed by H.L. Bai; E.Y. Jiang; P. Wu; Z.D. Lou; Y. Wang; C.D. Wang

• Publisher: Springer
• Year: 1999
• Tongue: English
• Weight: 192 KB
• Volume: 69
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390051046