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Dry patterning through masks of organic materials

✍ Scribed by E.I. Tochitsky; E.I. Obukhov; A.I. Sharendo; V.V. Boksha; K.N. Kasparov

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 378 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)90091-v

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