✦ LIBER ✦

Dry etched high resolution positive and negative inorganic photoresist

✍ Scribed by E. Hajto; R.E. Belford; P.J.S. Ewen; A.E. Owen

Book ID: 115986859
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 197 KB
Volume: 115
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(89)90383-9

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