Development and structuring of combined positive-negative/negative-positive resists using laser ablation as positive dry etching technique

✍ Scribed by T. Lippert; J. Wei; A. Wokaun; N. Hoogen; O. Nuyken

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 78 KB
• Volume: 283
• Category: Article
• ISSN: 1438-7492
• DOI: 10.1002/1439-2054(20001101)283:1<140::aid-mame140>3.0.co;2-f