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Dry etch fabrication of porous silicon using xenon difluoride

โœ Scribed by Hajj-Hassan, M.; Cheung, M.; Chodavarapu, V.


Book ID
114461351
Publisher
The Institution of Engineering and Technology
Year
2010
Tongue
English
Weight
593 KB
Volume
5
Category
Article
ISSN
1750-0443

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