Double side polishing for VLSI of silicon wafer — one side mirror polishing considered with etched wafer roughness: Akamatsu, Kiyoshi; Nakamura, Takao; Masuda, Masami. Journal of the Japan Society for Precision Engineering. 1993 Jul; 59(7): 1163–1168

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 131 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90221-6