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Double-crystal Topographic Investigation of the Shape of Silicon Wafers after Oxidation

✍ Scribed by P. Zaumseil

Publisher: John Wiley and Sons
Year: 1982
Tongue: English
Weight: 293 KB
Volume: 17
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170170512

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