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Dose rate dependence of the ion-beam-induced epitaxial crystallization in silicon

✍ Scribed by V. Heera; R. Kögler; W. Skorupa; R. Grötzschel


Book ID
113284721
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
269 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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