Dose and energy dependence of implanted ion profiles (9:≦ 1 ≦ 83) in the AZ111 photoresist

✍ Scribed by R.B. Guimarães; M. Behar; R.P. Livi; J.P. De Souza; L. Amaral; F.C. Zawislak; D. Fink; J.P. Biersack

• Book ID: 114168162
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 296 KB
• Volume: 19-20
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(87)80176-3