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Doping reaction of PH3 and B2H6 with Si(100)

โœ Scribed by Yu, Ming L.; Vitkavage, D. J.; Meyerson, B. S.


Book ID
121193620
Publisher
American Institute of Physics
Year
1986
Tongue
English
Weight
775 KB
Volume
59
Category
Article
ISSN
0021-8979

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