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Doping of rf-sputtered a-SiGe:H alloys

✍ Scribed by P.K. Banerjee; J.M.T. Pereira; G.A. Hanidu; S.S. Mitra

Book ID: 115986468
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 316 KB
Volume: 104
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(88)90387-0

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