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Doping dependence of the specific contact resistance of NiSi2 on (100) n-Si

✍ Scribed by Sasse, E.; KoÌnig, U.

Book ID: 120586652
Publisher: American Institute of Physics
Year: 1988
Tongue: English
Weight: 462 KB
Volume: 64
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.341375

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