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Doping and electrical properties of amorphous silicon carbon nitride films

โœ Scribed by Chou, Y.C.; Chattopadhyay, S.; Chen, L.C.; Chen, Y.F.; Chen, K.H.


Book ID
122581468
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
147 KB
Volume
12
Category
Article
ISSN
0925-9635

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