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Doped Ta2O5 and mixed HfO2–Ta2O5 films for dynamic memories applications at the nanoscale

✍ Scribed by E. Atanassova; A. Paskaleva; D. Spassov


Book ID
113800614
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
692 KB
Volume
52
Category
Article
ISSN
0026-2714

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