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Donor generation in monocrystalline silicon by Halogen implantation : G. Greeuw and J. F. Verwey. Solid-St. Electron.26 (3), 241 (1983)


Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
110 KB
Volume
23
Category
Article
ISSN
0026-2714

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