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Dominant parameter determining dangling-bond density in hydrogenated amorphous silicon films prepared by catalytic chemical vapor deposition

✍ Scribed by Atsushi Masuda; Chisato Niikura; Yoriko Ishibashi; Hideki Matsumura

Book ID: 108472192
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 147 KB
Volume: 66
Category: Article
ISSN: 0927-0248
DOI: 10.1016/s0927-0248(00)00182-3

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