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Does Chemistry Really Matter in the Chemical Vapor Deposition of Titanium Dioxide? Precursor and Kinetic Effects on the Microstructure of Polycrystalline Films

✍ Scribed by Taylor, Charles J.; Gilmer, David C.; Colombo, Daniel G.; Wilk, G. D.; Campbell, Stephen A.; Roberts, Jeff; Gladfelter, Wayne L.

Book ID: 121267337
Publisher: American Chemical Society
Year: 1999
Tongue: English
Weight: 325 KB
Volume: 121
Category: Article
ISSN: 0002-7863
DOI: 10.1021/ja984446f

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