Divergence in a high-intensity ion beam from a concave, multiple-aperture source electrode

Study of energy broadening of high-brigh

Study of energy broadening of high-brightness ion beams from a surface plasma Penning source and its relevance in ion projection lithography

✍ S.K. Guharay; E.A. Sokolovsky; M. Reiser; J. Orloff; J. Melngailis 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 310 KB

The energy spread AE (Full Width at Half Maximum of the energy distribution) of negative hydrogen ion (H-) beams has been measured for angular beam intensifies (In) over a range of about 40 to 100 mA/sr. An In ~3 dependence of the energy spread is observed. This trend supports the mechanism of energ