Effect of RCA cleaning on the surface ch
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Onyiriuka, E. C.; Moore, C. B.; Fehlner, F. P.; Binkowski, N. J.; Salamida, D.;
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Article
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1998
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John Wiley and Sons
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English
⚖ 232 KB
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The surface chemistry of an alkaline-earth boroaluminosilicate glass is changed by contact with chemical solutions. The present study shows that RCA cleaning creates a silica-rich surface on the glass. This altered surface can be removed by hydroÑuoric acid etching. During the RCA cleaning process,