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Dissolution kinetics of B clusters in crystalline Si

โœ Scribed by D. De Salvador; E. Napolitani; G. Bisognin; A. Carnera; E. Bruno; S. Mirabella; G. Impellizzeri; F. Priolo

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
366 KB
Volume
124-125
Category
Article
ISSN
0921-5107

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๐Ÿ“œ SIMILAR VOLUMES

Lattice strain of Bโ€“B pairs formed by He
Lattice strain of Bโ€“B pairs formed by He irradiation in crystalline Si1โˆ’xBx/Si
โœ G. Bisognin; D. De Salvador; E. Napolitani; A. Carnera; L. Romano; A.M. Piro; S. ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 344 KB

This work reports on the lattice strain induced by small B clusters in Si produced by He irradiation of an epitaxial layer uniformly doped with substitutional B. By means of high resolution X-ray diffraction measurements and nuclear reaction analysis, lattice strain profiles and B lattice location o