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Displacement Talbot lithography: a new method for high-resolution patterning of large areas

โœ Scribed by Solak, Harun H.; Dais, Christian; Clube, Francis


Book ID
115414152
Publisher
Optical Society of America
Year
2011
Tongue
English
Weight
1021 KB
Volume
19
Category
Article
ISSN
1094-4087

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