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Discharge studies in a triode ion plating system

✍ Scribed by KR Gunasekhar; S Mohan


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
294 KB
Volume
42
Category
Article
ISSN
0042-207X

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Estimation of density of charge species
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Triode discharges are widely used in plasma assisted physical vapour deposition techniques to enhance ionisation even under low pressures. In addition to this, the triode discharges enable independent control of substrate bias currents irrespective of bias voltage and pressure, compared to magnetron