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Discharge cleaning and gas trapping by use of a glow-mode plasma source

✍ Scribed by T. Kawabe; M. Kaminaga; M. Fukazawa; K. Nakazato; T. Hayashi; S. Sato; A. Itoh

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 231 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)94150-o

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