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Direct-write electron beam system : Paul Petric and Ollie Woodard. Solid St. Technol. 154 (September 1983)

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 130 KB
Volume: 24
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(84)90407-4

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📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 132 KB